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Proceedings Paper

A Small-Angle Scatterometer
Author(s): Steven J Wein; William L. Wolfe
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Paper Abstract

The design, analysis, and performance of a small-angle scatterometer are presented. A dye-cell Gaussian apodized aperture is utilized to reduce the small-angle diffraction background. After the diffraction background is sufficiently reduced, the system scatter becomes the dominant noise in the instrument beam profile. The geometrical aberrations are graphically shown to have no significant effect on the higher-order diffraction rings of the beam profile, and as such, an aberrational tolerancing approach can be employed in scatterometer design. Small-angle scattered light measurements are presented for two mirror samples. The associated beam profiles and NEBRDF levels are also given.

Paper Details

Date Published: 5 April 1989
PDF: 14 pages
Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); doi: 10.1117/12.948112
Show Author Affiliations
Steven J Wein, University of Arizona (United States)
William L. Wolfe, University of Arizona (United States)

Published in SPIE Proceedings Vol. 0967:
Stray Light and Contamination in Optical Systems
Robert P. Breault, Editor(s)

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