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Proceedings Paper

Long Trace Profile Measurements On Cylindrical Aspheres
Author(s): Peter Z Takacs; Su-chen Kate Feng; Eugene L. Church; Shi-nan Qian; Wu-ming Liu
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Paper Abstract

A new long-trace optical profiling instrument is now in operation at Brookhaven National Laboratory measuring surface figure and macro-roughness on large optical components, principally long cylindrical mirrors for use in synchrotron radiation beam lines. The non-contact measurement technique is based upon a pencil-beam interferometer system. The optical head is mounted on a linear air bearing slide and has a free travel range of nearly one meter. We are able to sample surface spatial periods between 1 mm (the laser beam diameter) and 1 m. The input slope data is converted to surface height by a Fourier filtering technique which distributes the random noise error contributions evenly over the entire trace length. A number of optical components have been measured with the instrument. Results are presented for fused silica cylinders 900 mm and 600 mm in length and for a fused silica toroid and several electroless nickel-plated paraboloids.

Paper Details

Date Published: 29 January 1989
PDF: 11 pages
Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); doi: 10.1117/12.948082
Show Author Affiliations
Peter Z Takacs, Brookhaven National Laboratory (United States)
Su-chen Kate Feng, Brookhaven National Laboratory (United States)
Eugene L. Church, USA ARDEC (United States)
Shi-nan Qian, University of Science and Technology of China (China)
Wu-ming Liu, Institute of High Energy Physics (China)

Published in SPIE Proceedings Vol. 0966:
Advances in Fabrication and Metrology for Optics and Large Optics
Jones B. Arnold; Robert E. Parks, Editor(s)

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