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Proceedings Paper

Very High Resolution Profiler For Diamond Turning Groove Analysis
Author(s): Steven R Lange
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Paper Abstract

Recent advances to the WYKO TOPO-2D and TOPO-3D surface profilers provide new analysis techniques for the measurement of diamond turned surfaces. Very high spatial resolution is made possible by the introduction of a phase shifting Linnik interference microscope objective where spatial resolutions less than 0.5 μm and height resolutions of less than 0.01 nm are possible. Additional new software has been developed to analyze localized slopes, power spectrum, and roughness along and perpendicular to the lay. Analyses of diamond turned samples measured at 200X are included.

Paper Details

Date Published: 29 January 1989
PDF: 15 pages
Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); doi: 10.1117/12.948061
Show Author Affiliations
Steven R Lange, WYKO Corporation (United States)

Published in SPIE Proceedings Vol. 0966:
Advances in Fabrication and Metrology for Optics and Large Optics
Jones B. Arnold; Robert E. Parks, Editor(s)

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