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Proceedings Paper

Absolute Interferometric Testing Of Spherical Surfaces
Author(s): Bruce E. Truax
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Paper Abstract

In typical interferometric testing the part under test is measured against a reference standard. The measured result is the difference between the errors in the test and reference surfaces plus any additional errors introduced by the interferometer. For accurate qualification of the reference surface it is necessary to employ a technique that can measure the part absolutely. This paper examines an existing technique) for absolute testing of spherical surfaces which produces a map of the entire surface. The capabilities of this technique, error sources, and experimental data will be examined.

Paper Details

Date Published: 29 January 1989
PDF: 8 pages
Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); doi: 10.1117/12.948058
Show Author Affiliations
Bruce E. Truax, Zygo Corporation (United States)

Published in SPIE Proceedings Vol. 0966:
Advances in Fabrication and Metrology for Optics and Large Optics
Jones B. Arnold; Robert E. Parks, Editor(s)

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