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Proceedings Paper

Atmospheric Pressure Induced Reduction Errors In Reduction Stepper Lenses
Author(s): Fred Sporon-Fiedler; John Williams
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Paper Abstract

The effect of atmospheric pressure variations on the reduction ratio of a stepper lens is discussed. Data for a 5X lens is presented which demonstrates a dependence of the reduction ratio on the atmospheric pressure. The dependence can lead to a .3 um error in the reduction of an 11 mm field. A model based on thin lens optics is also presented which predicts the observed trends. Methods of minimizing the impact of this effect are discussed.

Paper Details

Date Published: 23 July 1985
PDF: 5 pages
Proc. SPIE 0538, Optical Microlithography IV, (23 July 1985); doi: 10.1117/12.947751
Show Author Affiliations
Fred Sporon-Fiedler, Hewlett-Packard Corporation (United States)
John Williams, Hewlett-Packard Corporation (United States)


Published in SPIE Proceedings Vol. 0538:
Optical Microlithography IV
Harry L. Stover, Editor(s)

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