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Proceedings Paper

A Non-Contact ED Sensor For Irterferometric End Gauge Calibration
Author(s): L. S. Tanwar; P. C. Jain
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Paper Abstract

A simple optical triangulation based electro-optical sensor with 0.01 µm resolution has been successfully used for the interferoretric calibration of 1m end gauge. Two independent illuminating and detecting arms were mounted together to gauge both the faces of the gauge alternately. The null photo-signals defined the gauge planes and the in-between displacement was measured by a laser interferometer. A precision of 0.25 μm was obtained which was limited by the mechanical vibration found to be present in the machine bed. The experimental set-up details, procedure adopted and the results arrived at are presented.

Paper Details

Date Published: 16 January 1989
PDF: 5 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947601
Show Author Affiliations
L. S. Tanwar, National Physical Laboratory (India)
P. C. Jain, National Physical Laboratory (India)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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