This paper describes a commercial optical profilometer, the UB 60, and several of its industrial applications. The operating principle of the instrument is based on the dynamic focussing of a confocal microscope, a technique adapted from known CD player technology. The paper begins with a brief description of the profilometer itself, concentrating on the optical system, and then continues with a brief description of four applications. Finally some encountered measurement problems and their solutions are discussed.

Date Published: 16 January 1989
PDF: 8 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947590

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)