Share Email Print

Proceedings Paper

Phase-Measuring Interferometry: Performance Characterization And Calibration
Author(s): H.Philip Stahl; Jay A. Tome
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Performance parameters describe a phase-measuring interferometer's system operating conditions, its ability to acquire information in a given testing environment, and the quality of that information. This paper presents a review of these parameters, their definitions and quantification. Additionally, a self-referencing technique is presented for the absolute calibration and removal of an interferometer reference wavefront signature.

Paper Details

Date Published: 16 January 1989
PDF: 10 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947576
Show Author Affiliations
H.Philip Stahl, Breault Research Organization, Inc. (United States)
Jay A. Tome, Breault Research Organization, Inc. (United States)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?