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Proceedings Paper

High Tc Superconducting Thin Films And Devices Made From YBa2Cu3Oy
Author(s): Robert B. Laibowitz; Roger H. Koch
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Paper Abstract

We have used both electron-beam vapor deposition and sputtering systems to deposit superconducting thin films of the compound YBa2Cu30y. In the e-beam deposition system the three metals are individually evaporated in an oxygen partial pressure while the sputtering system uses composite targets. After a high temperature furnace anneal in flowing oxygen these films can have transition temperatures as high as 91 K. The films in thicknesses ranging from 0.07 to several microns are deposited on a variety of substrates such as alumina, Si, MgO, zirconia and SrTiO3. The epitaxial films which are grown on polished SrTiO3 single crystals generally show the highest critical current density, around 101A/cm2 observed at 4 K. Device applications of these films such as SQUIDs and transmission lines will be discussed with particular reference to the processing and patterning techniques used in their fabrication. These techniques include photo-and e-beam lithography, ion implantation and milling and laser ablation.

Paper Details

Date Published: 23 August 1988
PDF: 1 pages
Proc. SPIE 0948, High-Tc Superconductivity: Thin Films and Devices, (23 August 1988); doi: 10.1117/12.947463
Show Author Affiliations
Robert B. Laibowitz, IBM Research Division (United States)
Roger H. Koch, IBM Research Division (United States)

Published in SPIE Proceedings Vol. 0948:
High-Tc Superconductivity: Thin Films and Devices
Cheng-Chung John Chi; R. Bruce van Dover, Editor(s)

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