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Proceedings Paper

Thinned Backside Illuminated CCDs For Ultraviolet Imaging
Author(s): C. Tassin; Y. Thenoz; J. Chabbal
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Paper Abstract

This paper presents the first results obtained at Thomson-CSF on thinned CCDs (576 x 384 pixels) developed for ultraviolet imaging. The process involves chemical thinning of the CCD down to about 10 microns, followed by a shallow implantation (p+ for backside accumulation) activated by laser annealing. UV quantum efficiencies as high as 20 % are measured at 2540 A despite an absorption length in silicon of 55 A at this wavelength. Measurements under 5.9 keV (Fe55) X-ray irradiation have shown 295 eV FWHM energy resolution. After optimization of various parameters in the backside treatment, this technology will in course be applied to several sensors : 1024 x 1024 and buttable devices.

Paper Details

Date Published: 16 August 1988
PDF: 6 pages
Proc. SPIE 0932, Ultraviolet Technology II, (16 August 1988); doi: 10.1117/12.946905
Show Author Affiliations
C. Tassin, THOMSON-CSF Division Tubes Electroniques (France)
Y. Thenoz, THOMSON-CSF Division Tubes Electroniques (France)
J. Chabbal, THOMSON-CSF Division Tubes Electroniques (France)

Published in SPIE Proceedings Vol. 0932:
Ultraviolet Technology II
Robert E. Huffman, Editor(s)

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