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Proceedings Paper

Microprofiling Of Precision Surfaces
Author(s): James M. Zavislan; Jay M. Eastman
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Paper Abstract

A long scan non-contacting optical surface microprofiling instrument is described in this paper. The instrument l, based on the principle of differential interference microscopy, measures the profile of a precision surface along a single scan line. The present hardware allows scan lengths of up to 100 millimeters. Data is acquired at a rate of 2 millimeters per second. Calculation of the surface profile from the raw data requires 2 minutes using a standard IBM-PC. The lateral resoluition of the instrument is diffraction limited at 2 micrometers. This paper presents surface profile data for several types of pecision surfaces. Data from a commercial quality optical flat demonstrates vertical resolution of less than 2.0 Angstroms and lateral resolution of approximately 2.0 micrometers. An aluminized surface relief zone plate with vertical surface deviations in the range of 12,000 Angstroms is profiled over a scan length of 3 millimeters. Irregularities approximately 100 Angstroms high are clearly resolved. A scan of a Gaussian diffuser shows the ability of the instrument to profile surfaces with large surface deviations. The RMS roughness of the diffuser is 2.0 micrometers. Data is also presented for a non-optical surface. Surface profile data for a burnished Winchester disk illustrates the use of the instrument to study the surface characteristics of components use for high density information storage.

Paper Details

Date Published: 3 September 1985
PDF: 5 pages
Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946360
Show Author Affiliations
James M. Zavislan, University of Rochester (United States)
Jay M. Eastman, Optel Systems Inc. (United States)

Published in SPIE Proceedings Vol. 0525:
Measurement and Effects of Surface Defects & Quality of Polish
Lionel R. Baker; Harold E. Bennett, Editor(s)

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