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Proceedings Paper

E-Beam Fabrication Of Computer-Generated Holograms (CGH)
Author(s): Steven M. Arnold
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Paper Abstract

We report here the development of an integrated capability for writing computer-generated holograms (CGHs) using either of two commercially available electron-beam lithography systems. These binary, chrome-on-glass holograms have been used extensively for aspheric optical testing and also have applications to the interferometric recording of holograms. Algorithms are described for encoding CGHs for e-beam writing. Limitations of e-beam CGH fabrication are discussed. A self-contact lithography and ion milling process is described for converting chrome-on-glass holograms into 40-percent efficient, environmentally durable, all-glass holograms.

Paper Details

Date Published: 12 June 1985
PDF: 7 pages
Proc. SPIE 0523, Applications of Holography, (12 June 1985); doi: 10.1117/12.946294
Show Author Affiliations
Steven M. Arnold, Honeywell Physical Sciences Center (United States)

Published in SPIE Proceedings Vol. 0523:
Applications of Holography
Lloyd Huff, Editor(s)

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