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Proceedings Paper

Holographic Optical Processing For Submicron Defect Detection
Author(s): R. L. Fusek; L. H. Lin; K. Harding; S. Gustafson
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Paper Abstract

Automated defect detection in highly repetitive subject formats such as integrated circuit photomasks has been the subject of numerous papers in the past.1-6 Techniques previously reported generally fall into two basic categories - namely digital and optical processing methods. Digital techniques involve the bit by bit or pixel by pixel comparison of information associated with two subjects. One subject is generally a highly magnified image of a portion of a single die. The other subject is either a similar image of a reference die, such as an adjacent die, or the digital data base used to generate the photomask. Optical processing methods differ fundamentally from digital techniques in that the subject information is manipulated not in the image plane, but in the Fourier Transform plane normally formed by a lens. The optical information processing discussed in this paper is limited to spatial frequency filtering.

Paper Details

Date Published: 12 June 1985
PDF: 6 pages
Proc. SPIE 0523, Applications of Holography, (12 June 1985); doi: 10.1117/12.946267
Show Author Affiliations
R. L. Fusek, Insystems, Incorporated (United States)
L. H. Lin, Insystems, Incorporated (United States)
K. Harding, Insystems, Incorporated (United States)
S. Gustafson, University of Dayton Research Institute (United States)

Published in SPIE Proceedings Vol. 0523:
Applications of Holography
Lloyd Huff, Editor(s)

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