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Proceedings Paper

Design Consideration Of A Radiation Cooled Slotted Rotating Target X-Ray Source
Author(s): S Hattori; M Asano; T Tagawa; S Yoshikawa
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Paper Abstract

A practical design of 0.1 cm diameter, 10 KW e-beam power, point x-ray source with v-shaped slotted rotating target is discussed. This point x-ray source can give penumbra--2 intra-wafer-distortion trade-off resolution of 0.13 pm and inverse-throughput for 25cm-2 sensitivity resist of 1.8 s•cm-1. Temporal temperature rise for 7 cm slot radius and 50 s-1 revolution remain within 260 °C. Effect of radiation cooling by stacked fins are calculated. Thus estimate average temperature rise amounts to 490°C over cooling temperature. Estimated temperature rise of rotating axis is 300 °C. Effect of stacked fins as evacuation resistance is also discussed. We can maintain e-beam chamber within 10-8 torr by using fero-fluidic seal working at 10-8 torr condition.

Paper Details

Date Published: 14 June 1988
PDF: 8 pages
Proc. SPIE 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, (14 June 1988); doi: 10.1117/12.945647
Show Author Affiliations
S Hattori, Nagoya University (Japan)
M Asano, Meitec Corporation (Japan)
T Tagawa, Meitec Corporation (Japan)
S Yoshikawa, ULVAC Corporation (Japan)

Published in SPIE Proceedings Vol. 0923:
Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII
Arnold W. Yanof, Editor(s)

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