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Proceedings Paper

Vibration Sensor Using Planar Integrated Interferometric Circuit On Oxidised Silicon Substrate
Author(s): P. Gidon; S. Valette; P. Schweizer
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Paper Abstract

We present the first test of a planar integrated optical interferome-trer used as a microdisplacement or vibration sensor. A schematic diagram of this device is shown figure 1. Essentially, it is a Michelson interferometer achieved with our classical planar structure Si/SiO2/Si3N4/SiO2 [1-2] including : . the grating coupler operating in the third order (period = 2μm) ; . the beam splitter, achieved by local etching of the SiO2 over-layer ; . two mirrors also obtained by etching of the silica followed by an aluminium deposition, in order to lower the T.I.R.* angle ; . and two cleaved faces.

Paper Details

Date Published: 12 November 1984
PDF: 4 pages
Proc. SPIE 0514, 2nd Intl Conf on Optical Fiber Sensors: OFS'84, (12 November 1984); doi: 10.1117/12.945078
Show Author Affiliations
P. Gidon, LETI - Commissariat a l'Energie Atomique (France)
S. Valette, LETI - Commissariat a l'Energie Atomique (France)
P. Schweizer, LETI - Commissariat a l'Energie Atomique (France)

Published in SPIE Proceedings Vol. 0514:
2nd Intl Conf on Optical Fiber Sensors: OFS'84
Ralf Th. Kersten; Rainer Kist, Editor(s)

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