A unique method of fabricating silicon lenticular lens arrays has been developed to increase the effective fill-factor ratio of infrared focal plane arrays. Results on 32 x 63 element monolithic Schottky barrier (IR-CCD) devices have demonstrated greater than a factor of two improvement in device photoresponse. These miniature lenses are repeated in a uni-directional pattern to increase the optical fill-factor (in one dimension) to effectively 100%. Large arrays of these lenses have been fabricated on three inch silicon wafers, using a single photolithography step and unique three-step etching process. A novel procedure for lens array to device mounting and alignment have been developed to maximize lens efficiency. Near optimum performance was achieved and has been demonstrated through the application of lenticular arrays to Schottky barrier IR-CCD two dimensional focal plane arrays.

Date Published: 8 November 1984
PDF: 9 pages
Proc. SPIE 0501, State-of-the-Art Imaging Arrays and Their Applications, (8 November 1984); doi: 10.1117/12.944660

Published in SPIE Proceedings Vol. 0501:
State-of-the-Art Imaging Arrays and Their Applications
Keith N. Prettyjohns, Editor(s)