The LH A 400 in-line sputtering system for large scale production of magneto-optical disks is described. This system is based on a modular concept to realize different layer configurations of MO-disks. The deposition stations, loading and unloading chambers are separated by dynamic buffer modules to maintain a continuous flow of disk carriers and to guarantee the stability of the sputtering processes. Transmission and reflection spectra, coercivity and MO-signal of the coated disks are measured in real-time and fed back for on-line process control. Experimental results of a process development on dielectric (A1N and Si3N4) and magneto-optical (FeTbCo) thin films in a pilot machine are presented.

Date Published: 2 June 1988
PDF: 8 pages
Proc. SPIE 0899, Optical Storage Technology and Applications, (2 June 1988); doi: 10.1117/12.944618

Published in SPIE Proceedings Vol. 0899:
Optical Storage Technology and Applications
Donald B. Carlin; Albert A. Jamberdino; Yoshito Tsunoda, Editor(s)