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Proceedings Paper

A Process For Monolithic Fabrication Of Microlenses On Integrated Circuits
Author(s): Zoran D Popovic; Robert A Sprague; G A.N Connell
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Paper Abstract

A microlens fabrication process is described which is based on commercially available IC processing materials. The lenses are formed on top of circular pedestals by melting a photoresist developed in a suitable pattern. Due to surface tension forces melting leads to formation of a spherical surface which is pinned by the sharp edge of the pedestal. The process gives microlenses of excellent quality which show diffraction limited resolution.

Paper Details

Date Published: 2 June 1988
PDF: 3 pages
Proc. SPIE 0898, Miniature Optics and Lasers, (2 June 1988); doi: 10.1117/12.944557
Show Author Affiliations
Zoran D Popovic, Xerox Research Centre of Canada (Canada)
Robert A Sprague, Xerox Palo Alto Research Center (United States)
G A.N Connell, Xerox Palo Alto Research Center (United States)

Published in SPIE Proceedings Vol. 0898:
Miniature Optics and Lasers
Laurence E. Cramer; Gary T. Forrest; Chandrasekhar Roychoudhuri, Editor(s)

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