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Proceedings Paper

Determination Of Fields Near A Silver Strip On A Glass Substrate
Author(s): Egon Marx; E.Clayton Teague
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Paper Abstract

The theory and numerical considerations that are used in the computation of the scattered electromagnetic fields near the surface of a silver strip on a glass substrate are presented. These calculations provide theoretical guidance for the measurement of the width of the strip by means of near-field optical scanning. The dimensions of the strip cross section, e. g. 300 nm by 100 nm, can be a fraction of the wavelength of the incident light, 632.8 nm. The flux 1 nm above the surface shows sharp spikes at the edges of the strip. The features of the fields near such a surface could be used for accurate width measurements up to about 30 nm above the strip. The effects of other variables are also shown in the figures.

Paper Details

Date Published: 12 July 1988
PDF: 9 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944541
Show Author Affiliations
Egon Marx, National Bureau of Standards (United States)
E.Clayton Teague, National Bureau of Standards (United States)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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