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Proceedings Paper

Scanning Capacitance Microscopy
Author(s): J R Matey
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Paper Abstract

Scanning capacitance microscopy is a mechanically scanned microscopy which uses variations in the capacitance between the sample and a scanning tip as a probe of sample topography. In this paper we discuss the theory of the capacitance probe and its application to scanning capacitance microscopy and fringe field profilometry .

Paper Details

Date Published: 12 July 1988
PDF: 8 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944526
Show Author Affiliations
J R Matey, David Sarnoff Research Center (United States)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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