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Proceedings Paper

Near-Field Scanning Optical Microscopy (NSOM)
Author(s): E Betzig; M Isaacson; H Barshatzky; A Lewis; K Lin
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Paper Abstract

Superresolution optical images have been generated with near-field scanning optical microscopy (NSOM). The underlying concept is presented and several modes of operation are discussed. A resolution based on edge sharpness of 70 nm or better has been demonstrated with two different instruments. Images have been obtained which characterize the resolution as a function of two critical parameters: the aperture size and the aperture-sample separation. The near-field images also illustrate novel features resulting from several forms of contrast. Finally, the potential of NSOM is compared with conventional lens-based forms of microscopy as well as with more recent scanned tip methods.

Paper Details

Date Published: 12 July 1988
PDF: 9 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944521
Show Author Affiliations
E Betzig, Cornell University (United States)
M Isaacson, Cornell University (United States)
H Barshatzky, Cornell University (United States)
A Lewis, Cornell University (United States)
K Lin, Cornell University (United States)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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