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Proceedings Paper

Scanning Near-Field Optical Microscopy (SNOM*): Basic Principles And Some Recent Developments
Author(s): D. W. Pohl; U. Ch. Fischer; U. T. Durig
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Paper Abstract

The elastic scattering efficiency from subwavelength-size surface holes or protrusions depends sensitively on the dielectric properties of their immediate environment. Scanning near-field optical microscopy exploits this effect to create optical images whose resolution is not restricted by the diffraction limit. Typically, 20 nm laterally and, when operated in a topographic mode, 0.1 nm in height can be resolved. Images were obtained both in transmission and reflection.

Paper Details

Date Published: 12 July 1988
PDF: 7 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944518
Show Author Affiliations
D. W. Pohl, IBM Research Division (Switzerland)
U. Ch. Fischer, Ernst-Leitz-Wetzlar (Germany)
U. T. Durig, IBM Research Division (Switzerland)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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