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Proceedings Paper

Industrial Excimer Lasers: Issues And Answers
Author(s): T A Znotins; B Norris
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Paper Abstract

Industrial applications of excimer lasers are expanding rapidly. This trend has led to the evolution of a new generation of excimer lasers designed specifically for industrial usage. This paper reviews some of the issues which need to be addressed in the development of such a laser. Included are market considerations, technology related items and issues related to the laser configuration.

Paper Details

Date Published: 12 July 1988
PDF: 7 pages
Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); doi: 10.1117/12.944383
Show Author Affiliations
T A Znotins, Lumonics Inc (United States)
B Norris, Lumonics Inc (United States)

Published in SPIE Proceedings Vol. 0894:
Gas Laser Technology
Peter P. Chenausky; Roland A. Sauerbrey; James H. Tillotson, Editor(s)

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