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Proceedings Paper

Practical Excimer Laser Energy And Power Measurement: A Laser Manufacturer's Perspective.
Author(s): Steven N Bittenson
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Paper Abstract

A discussion is presented of issues specific to the measurement of pulsed ultraviolet excimer laser radiation, emphasizing a need for the establishment of standards for pulse energy, average power, and beam dimensions.

Paper Details

Date Published: 15 August 1988
PDF: 5 pages
Proc. SPIE 0888, Laser Beam Radiometry, (15 August 1988); doi: 10.1117/12.944233
Show Author Affiliations
Steven N Bittenson, Questek Inc. (United States)

Published in SPIE Proceedings Vol. 0888:
Laser Beam Radiometry
Aaron A. Sanders, Editor(s)

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