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Proceedings Paper

The Commercialization Of Engineered Diamond Technology
Author(s): M. Peters; J M Pinneo; L S Plano; K V Ravi; V Versteeg; S Yokota
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Paper Abstract

Some of the commercial aspects of thin diamond films deposited by plasma enhanced chemical vapor deposition are reviewed. Diamond films deposited by the use of DC bias have been characterized by using a variety of techniques including Raman spectroscopy and scanning electron microscopy. The relationship between deposition conditions and film characteristics are discussed.

Paper Details

Date Published: 18 May 1988
PDF: 7 pages
Proc. SPIE 0877, Micro-Optoelectronic Materials, (18 May 1988); doi: 10.1117/12.943943
Show Author Affiliations
M. Peters, Crystallume (United States)
J M Pinneo, Crystallume (United States)
L S Plano, Crystallume (United States)
K V Ravi, Crystallume (United States)
V Versteeg, Crystallume (United States)
S Yokota, Crystallume (United States)

Published in SPIE Proceedings Vol. 0877:
Micro-Optoelectronic Materials
Carl A. Kukkonen, Editor(s)

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