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Proceedings Paper

Liquid-Phase Laser Surface Modification
Author(s): Terence Donohue
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Paper Abstract

Several laser-controlled thermal and photochemical processes at liquid/solid interfaces are described. These include etching of silicon dioxide and copper in a number of aqueous and organic solvents. Reactions range from simple, thermally-enhanced types to photo-chemically sensitized systems. Advantages and limitations of the liquid phase in surface processing are discussed.

Paper Details

Date Published: 28 June 1984
Proc. SPIE 0482, Applications of Laser Chemistry & Diagnostics, (28 June 1984); doi: 10.1117/12.943112
Show Author Affiliations
Terence Donohue, Naval Research Laboratory (United States)

Published in SPIE Proceedings Vol. 0482:
Applications of Laser Chemistry & Diagnostics
Albert B. Harvey, Editor(s)

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