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Proceedings Paper

A Double Pass Attachment For The Linear And Plane Mirror Interferometer
Author(s): Richard R. Baldwin; Graham J. Siddall
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Paper Abstract

An optical accessory has been devised for doubling the resolution of the Hewlett-Packard linear and plane mirror interferometers. This device, termed the double pass attachment, does not fold one of the two interfering beams, as in previous attempts to extend resolution optically, and hence does not introduce error due to its own motion. The simple addition of a quarter wave plate to the attachment can be used to give a differential version of the plane mirror interferometer. Various configurations of this differential interferometer, and their application to I.C. lithographic and inspection equipment, are discussed.

Paper Details

Date Published: 15 October 1984
PDF: 8 pages
Proc. SPIE 0480, Integrated Circuit Metrology II, (15 October 1984); doi: 10.1117/12.943051
Show Author Affiliations
Richard R. Baldwin, Hewlett-Packard Laboratories (United States)
Graham J. Siddall, Hewlett-Packard Laboratories (United States)

Published in SPIE Proceedings Vol. 0480:
Integrated Circuit Metrology II
Diana Nyyssonen, Editor(s)

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