Experiences at Pacific Northwest Laboratory in the selection, deposition and characterization of oxide optical coatings for use with excimer lasers are reviewed. Fabrication results for all-dielectric high reflectors at 248 and 308 nm are presented. Glassy or amorphous coating materials such as Si02 and Ta205 appear to be more promising for ultraviolet use than polycrystalline materials such as Y203, A1203, Zr02 and Hf02 because of reduced surface roughness. Glassy materials, formed by ion bombardment or by mixing oxides according to the method of Sanders, Farabaugh and Haller, appear to be a promising direction for future ultraviolet coating development.

Date Published: 15 August 1984
PDF: 5 pages
Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); doi: 10.1117/12.942586

Published in SPIE Proceedings Vol. 0476:
Excimer Lasers: Their Applications & New Frontiers in Lasers
Ronald W. Waynant, Editor(s)