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Proceedings Paper

Wafer Alignment Performance Through An MOS Process
Author(s): A Marsh
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Paper Abstract

The sources of errors arising in the implementation of a Censor SRA100 wafer stepper in a CMOS process are analysed with reference to a specially designed standard alignment mark. Results confirm that the registration performance of the machine is in the range 0.2 to 0.4μm and indicate critical areas for attention to attain a registration consistently below 0.20μm. The paper is divided into two main sections: metrology and process experience.

Paper Details

Date Published: 29 June 1984
PDF: 7 pages
Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); doi: 10.1117/12.941898
Show Author Affiliations
A Marsh, Plessey Research (Caswell) Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 0470:
Optical Microlithography III: Technology for the Next Decade
Harry L. Stover, Editor(s)

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