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Proceedings Paper

Invited Paper Thin Film Morphology: Molecular Dynamics Studies
Author(s): George H. Gilmer; Marcia H. Grabow
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Paper Abstract

Thin films deposited from the vapor or by molecular beam epitaxy exhibit a wide range of morphologies. Low temperature processes often lead to an irregular columnar structure, with numerous pores and voids throughout the film. At higher temperatures the structure is usually more compact, but the formation of a deposit of uniform thickness may be precluded by clustering. In this paper we consider model studies of the structure of thin films based on molecular dynamics calculations of the deposition process and of thin film stability. Although large scale simulations of vapor deposition in three dimensions are not feasible on realistic time scales, important information can be obtained by the use of stability arguments and elementary models. The morphologies corresponding to meatstable and equilibrium states are predicted from the potential energy surfaces. Kinetic effects on thin film structures are assessed by simulations of two-dimensional and simple three-dimensional systems.

Paper Details

Date Published: 2 February 1988
PDF: 12 pages
Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941842
Show Author Affiliations
George H. Gilmer, AT&T Bell Laboratories (United States)
Marcia H. Grabow, AT&T Bell Laboratories (United States)

Published in SPIE Proceedings Vol. 0821:
Modeling of Optical Thin Films
Michael Ray Jacobson, Editor(s)

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