Interferometric metrology is used in a number of different modes at Perkin-Elmer. In addition to its wide application of evaluating optical surfaces for figure it is also used to determine the inhomogeneity of optical materials, examine the polishability of surfaces in terms of surface roughness, determine the mechanical and thermal stability of materials and aid in the assembly of optical systems. There is installed a large base of conventional interferometers to perform these metrology operations. Many have been designed and built to measure very specific optical components.

Date Published: 23 March 1987
PDF: 10 pages
Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941768

Published in SPIE Proceedings Vol. 0816:
Interferometric Metrology
Norbert A. Massie, Editor(s)