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Proceedings Paper

Numerical Analysis Of Multistep Dielectric Gratings
Author(s): Jiro Yamakita; Katsu Rokushima; Shizuo Mori
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Paper Abstract

An exact numerical method of analyzing deep dielectric gratings with multistep lamellar profiles is presented. This method is able to predict the diffraction efficiencies of dielectric gratings for both TE and TM polarizations. In this paper we use a modal expansion method in terms of modal functions which are rigorous solutions of the Maxwell's equations and fulfill the boundary conditions on the upright enclosing sides of the rectangular profiles. The coefficients of the modal expansion are determined such that the mean-square boundary residual becomes minimum, and the sequence of approximate solutions converges rapidly and monotonically with respect to the truncation size of the expansion order with help of the smoothing procedure of the modal fields. To show the validity of this algorithm in the sinusoidal surface-relief gratings, the results are compared with those obtained by other methods.

Paper Details

Date Published: 9 February 1987
PDF: 5 pages
Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941747
Show Author Affiliations
Jiro Yamakita, University of Osaka Prefecture (Japan)
Katsu Rokushima, University of Osaka Prefecture (Japan)
Shizuo Mori, University of Osaka Prefecture (Japan)

Published in SPIE Proceedings Vol. 0815:
Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III
Jeremy M. Lerner, Editor(s)

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