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Proceedings Paper

Scanning Laser Imaging Of Surface Chemistry And Physics
Author(s): D. E. Williams; A. M. Riley; R. Peat
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Paper Abstract

This paper describes a technique in which an electrolyte solution is used to form a junction with the surface of a metal or semiconductor, and images are formed using phenomena stimulated by scanned illumination of the surface. Photocurrent images showing the spreading and then the breakdown of inhibitor films on copper, and images showing recombination centres, and other electronic features in the surface of gallium arsenide, are presented. The potential application of the method to the in-situ imaging of anodising and etching processes on semiconductors is described. In principle one may obtain information on the spatial distributions of donor density, surface state density and reaction kinetics, and surface film thickness.

Paper Details

Date Published: 3 August 1987
PDF: 8 pages
Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); doi: 10.1117/12.941494
Show Author Affiliations
D. E. Williams, Harwell Laboratory (UK.)
A. M. Riley, Harwell Laboratory (UK.)
R. Peat, Harwell Laboratory (UK.)

Published in SPIE Proceedings Vol. 0809:
Scanning Imaging Technology
Ludwig J. Balk; Tony Wilson, Editor(s)

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