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Proceedings Paper

Modeling Of Energy And Mass Transport In Laser-Assisted CVD I: Surface Morphology
Author(s): D. C. Skouby; K. F. Jensen
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Paper Abstract

The chemical vapor deposition of metals induced by continuous laser irradiation of a substrate is modeled. The transient heat conduction problem is solved in the solid substrate, while the gas phase heat and mass transfer processes are assumed to be in a quasi-steady state. Temperature dependent parameters are used and irregularly shaped deposits are considered. Volcano-like deposition profiles are found to occur under certain conditions of gas pressure and laser intensity. The model predictions show that depletion effects and adsorption-desorption phenomena are major factors in the occurrence of volcano-like deposits.

Paper Details

Date Published: 22 April 1987
PDF: 9 pages
Proc. SPIE 0797, Advanced Processing of Semiconductor Devices, (22 April 1987); doi: 10.1117/12.941036
Show Author Affiliations
D. C. Skouby, University of Minnesota (United States)
K. F. Jensen, University of Minnesota (United States)

Published in SPIE Proceedings Vol. 0797:
Advanced Processing of Semiconductor Devices
Sayan D. Mukherjee, Editor(s)

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