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Proceedings Paper

A High-Precision, Wide Dynamic Range CCD Based Image Acquisition System
Author(s): Robert E. Melen; Stephen Williams
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Paper Abstract

This paper describes a novel camera system to make precise measurements over a wide dynamic range of light intensities. The camera has been developed to provide measurements of very small (<1 micrometre) features on semiconductor wafers, observed through high-precision optical microscopes. As such, the system provides the basis of a high precision image acquisition system for use in an advanced line-width measuring instrument.

Paper Details

Date Published: 17 April 1987
PDF: 6 pages
Proc. SPIE 0775, Integrated Circuit Metrology, Inspection, & Process Control, (17 April 1987); doi: 10.1117/12.940420
Show Author Affiliations
Robert E. Melen, Quinsys Technology (United States)
Stephen Williams, Nanometrics, Inc (United States)

Published in SPIE Proceedings Vol. 0775:
Integrated Circuit Metrology, Inspection, & Process Control
Kevin M. Monahan, Editor(s)

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