For many years the ability to measure dielectric films and then produce a graphic output either in contour map or 3-dimensional form has been either slow or time consuming in labor. With the new generation of equipment on the market this is no longer the case. This paper will describe the operation of this equipment in obtaining contour maps of several typical processes and the use of these maps in the evaluation of these processes and related equipment. The advantage of advanced computer technology also allows the data to be collated for the generation of process control charts within seconds of the collection of the data. The use of these control charts will also be demonstrated.

Date Published: 17 April 1987
PDF: 10 pages
Proc. SPIE 0775, Integrated Circuit Metrology, Inspection, & Process Control, (17 April 1987); doi: 10.1117/12.940406

Published in SPIE Proceedings Vol. 0775:
Integrated Circuit Metrology, Inspection, & Process Control
Kevin M. Monahan, Editor(s)