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Proceedings Paper

Production Applications Of Laser Microchemistry
Author(s): D. C. Shaver; L. A. Stern; N. P. Economou; D. J. Ehrlich
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Paper Abstract

Cutting of conductors using laser-induced chemical etching as well as deposition of conducting links by laser photolysis have been demonstrated. These operations form the basis for a laser microchemistry tool useful for repair or modification of microcircuits. With our prototype system, we have been able to photolytically deposit conducting lines with resistivities of 250 μohm-cm. Because the process is photolytic, deposition can be initiated even over transparent areas, and film growth is well controlled.

Paper Details

Date Published: 1 September 1987
PDF: 7 pages
Proc. SPIE 0774, Lasers in Microlithography, (1 September 1987); doi: 10.1117/12.940394
Show Author Affiliations
D. C. Shaver, Micrion Corporation (United States)
L. A. Stern, Micrion Corporation (United States)
N. P. Economou, Micrion Corporation (United States)
D. J. Ehrlich, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 0774:
Lasers in Microlithography
John Samuel Batchelder; Daniel J. Ehrlich; Jeff Y. Tsao, Editor(s)

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