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Proceedings Paper

Dissolution And Swelling Studies Of Poly(Methyl Methacrylate) Resist Films
Author(s): J. S. Papanu; J. Manjkow; D. W. Hess; D. S. Soong; A. T. Bell
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Paper Abstract

The swelling and dissolution of thin film poly(methyl methacrylate), PMMA, in methyl isobutyl ketone (MIBK), and in solvent/nonsolvent mixtures of MIBK/methanol and methyl ethyl ketone/isopropanol have been investigated. Films were monitored using in situ ellipsometry. Parametric studies of the effects of molecular weight, molecular weight distribution, softbaking quench rate, solvent size, and temperature were performed with MIBK. These parameters were shown to have a significant effect on dissolution. The effects of solvent composition and temperature on swelling and dissolution were investigated with the binary solvents. Ternary diagrams based on Flory-Huggins interaction parameters were used to interpret the thermodynamics of swelling and dissolution. A narrow transition region (NTR) where the developer changed from a swelling to dissolving agent with a small change in composition or temperature was observed.

Paper Details

Date Published: 25 August 1987
PDF: 9 pages
Proc. SPIE 0771, Advances in Resist Technology and Processing IV, (25 August 1987); doi: 10.1117/12.940313
Show Author Affiliations
J. S. Papanu, University of California (United States)
J. Manjkow, University of California (United States)
D. W. Hess, University of California (United States)
D. S. Soong, University of California (United States)
A. T. Bell, University of California (United States)

Published in SPIE Proceedings Vol. 0771:
Advances in Resist Technology and Processing IV
Murrae J. Bowden, Editor(s)

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