Share Email Print

Proceedings Paper

Optical Inspection Tool For Disk Substrates
Author(s): Scott J. Sherratt
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

One of the goals of the Substrate Process & Technology group at IBM in Rochester, Minnesota is to provide disk programs with consistently high quality substrates. A substrate inspection system that uses laser light has been designed, built, and is being used at Rochester. This paper explains the optics and detection scheme of the inspection tool called the Substrate Defect Detector (SDD). The SDD has been useful in studies to improve disk quality and to solve substrate problems in both manufacturing and development environments. Some results of the studies are reported and explained. Several examples of how the inspection system has been used to help solve substrate manufacturing process problems are discussed. The design objectives, operation, and use of the SDD are explained.

Paper Details

Date Published: 20 April 1987
PDF: 6 pages
Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); doi: 10.1117/12.939835
Show Author Affiliations
Scott J. Sherratt, IBM System Products Division (United States)

Published in SPIE Proceedings Vol. 0749:
Metrology: Figure and Finish
Bruce E. Truax, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?