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Proceedings Paper

Ablation of Organic Materials with Excimer Lasers
Author(s): Thomas Znotins; Darcy Poulin; John Reid
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Paper Abstract

Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal process such as those associated with YAG or CO2 processing. This paper reviews the basic mechanisms associated with excimer laser ablation and presents examples of practical applications of this new technique.

Paper Details

Date Published: 6 April 1987
PDF: 5 pages
Proc. SPIE 0737, New Developments and Applications in Gas Lasers, (6 April 1987); doi: 10.1117/12.939680
Show Author Affiliations
Thomas Znotins, Lumonics Inc. (Canada)
Darcy Poulin, Lumonics Inc. (Canada)
John Reid, Lumonics Inc. (Canada)

Published in SPIE Proceedings Vol. 0737:
New Developments and Applications in Gas Lasers
Lee R. Carlson, Editor(s)

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