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Proceedings Paper

Integrated Langmuir Devices: Structural And Microprocessing Methods
Author(s): Scott E Rickert; Jerome B Lando
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Paper Abstract

Integrated Langmuir Devices ("ILD's") are hybrid microelectronic and microptic devices developed at the Polymer Microdevice Laboratory ("PML") at Case Western Reserve University. These devices are part organic/polymeric and part inorganic, utilizing the more desirable features of each to create multifunctional devices. Langmuir films prepared by the Lang-muir-Blodgett technique have been successfully integrated into the conventional batch processing methodologies of usual semiconductors. ILD's processing techniques and several products from this process technology are described.

Paper Details

Date Published: 28 January 1987
PDF: 4 pages
Proc. SPIE 0682, Molecular and Polymeric Optoelectronic Materials, (28 January 1987); doi: 10.1117/12.939646
Show Author Affiliations
Scott E Rickert, Case Western Reserve University (United States)
Jerome B Lando, Case Western Reserve University (United States)

Published in SPIE Proceedings Vol. 0682:
Molecular and Polymeric Optoelectronic Materials
Garo Khanarian, Editor(s)

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