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Proceedings Paper

High Resolution Optical Profilometer
Author(s): Andrei Brunfeld; Gregory Toker; Joseph Shamir
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Paper Abstract

The objective of this work was the development of a noncontact method for the measurement of the wavyness of polished surfaces. To obtain simplified measuring procedures interferometric methods were abandoned in favor of a focus seeking system that was developed earlier for machined surface inspection. The system is based on differential detection of the reflected light through two properly prepared and adjusted filters. The filter structure and alignment were investigated to obtain linear response and maximum sensitivity that amounted to 20nm in preliminary experiments.

Paper Details

Date Published: 23 March 1987
PDF: 6 pages
Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939601
Show Author Affiliations
Andrei Brunfeld, CLAL Electronics Ind. (Israel)
Gregory Toker, El-Op Electro-Optics Ind. (Israel)
Joseph Shamir, Technion (Israel)

Published in SPIE Proceedings Vol. 0680:
Surface Characterization and Testing
Katherine Creath, Editor(s)

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