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Proceedings Paper

New High Resolution Phase Conjugated Optical Correctors For Diffraction Limited Applications
Author(s): Luc Dame
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Paper Abstract

Diffraction limited use of optics, especially in Ultra Violet, requires correction of residual wavefront errors ranging from slight decentring to rough ripples. A new and very sensitive method using coherent UV light (257 nm) and a diverging Michelson Twymann interferometric set up, allows to generate by phase conjugation a perfect replica of residual wavefront errors directly in a photoresist thin film, in a one step process. Used in conjunction with the recording mirror or objective, this treated (coated) photoresist compensates any residual wavefront deviations down to possibly x/40 peak to peak. A 10 cm spherical mirror of phase defects amplitude x/14 peak to peak on the mirror surface (x/7 on the wavefront) was used to generate such a phase conjugated corrector. Interferometric testing in the UV (257nm) of the mirror plus corrector assembly yield a very good figure : x/24 peak to peak on the wavefront. Such a system is already diffraction limited down to 200 nm and even further in UV since the correlation length of the residual defects is large. This method could also be applied to large mirrors correction (the interferometer is actively stabilized using synchrone detection) which might significatively reduce their polishing cost.

Paper Details

Date Published: 19 December 1986
PDF: 4 pages
Proc. SPIE 0679, Current Developments in Optical Engineering and Diffraction Phenomena, (19 December 1986); doi: 10.1117/12.939584
Show Author Affiliations
Luc Dame, Laboratoire de Physique Stellaire et Planetaire (France)

Published in SPIE Proceedings Vol. 0679:
Current Developments in Optical Engineering and Diffraction Phenomena
Robert E. Fischer; James E. Harvey; Warren J. Smith, Editor(s)

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