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Proceedings Paper

Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance
Author(s): U J Gibson; C M Kennemore III
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Paper Abstract

We have investigated the properties of magnesium fluoride films made using ion assisted deposition, with argon or Freon as the source gas. The effect of the ion species and residual gases on the chemical, physical, and optical properties have been determined. For all films, the optical performance is strongly depen-dent on the presence of residual oxygen-bearing gases. For the Freon bombarded films the incorporation of carbon is not seen to degrade their transparency, and a more stoichiometric Mg:F ratio is acheived.

Paper Details

Date Published: 23 December 1986
PDF: 4 pages
Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); doi: 10.1117/12.939547
Show Author Affiliations
U J Gibson, University of Arizona (United States)
C M Kennemore III, University of Arizona (United States)

Published in SPIE Proceedings Vol. 0678:
Optical Thin Films II: New Developments
Richard Ian Seddon, Editor(s)

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