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Proceedings Paper

High Spatial Resolution Phase Measurements Of Optical Surfaces
Author(s): Chris L. Koliopoulos; David S Anderson
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Paper Abstract

The requirements on figure quality of large optics, particularly in the mid to high spatial frequen-cies have pushed beyond the limits of resolution of some common wavefront analysis methods such as the reduction of interferograms. The smoothness requirement for some large mirrors on spatial scales of a few centimeters can be on the order of 0.01 χ rms, making fabrication and testing of these mirrors difficult. The advent of direct phase measuring interferometry with the use of high density CCD or photodiode arrays can provide the means to achieve the needed spatial resolution.

Paper Details

Date Published: 13 February 1987
PDF: 6 pages
Proc. SPIE 0676, Ultraprecision Machining and Automated Fabrication of Optics, (13 February 1987); doi: 10.1117/12.939521
Show Author Affiliations
Chris L. Koliopoulos, University of Arizona (United States)
David S Anderson, University of Arizona (United States)

Published in SPIE Proceedings Vol. 0676:
Ultraprecision Machining and Automated Fabrication of Optics
Donald L. Decker, Editor(s)

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