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Proceedings Paper

Near-Specular Performance Of A Portable Scatterometer
Author(s): Kathleen A Magee; William L Wolfe
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Paper Abstract

A helium-neon portable scatterometer that was built and described previously has been modified. The intent was to obtain better data at angles very close to specular. We incorporated a twelve-element, linear array of silicon detectors in place of the first detector near the specular reflection direction, and removed the collimator to reduce the beam diameter. Attention was paid to scattered light from the instrument. A new scheme to orient the instrument to the sample surface using the array and the specular beam is described. Design details of the detection system capable of detecting signals ranging over five orders of magnitude and utilizing lock-in detection software are given. Results showing that the modification improved the scatterometer performance so that a Bidirectional Reflectance Distribution Function (BRDF) value of 1 sr-1 at one degree from specular can be measured with reasonable accuracy for a specular sample are discussed.

Paper Details

Date Published: 3 June 1987
PDF: 11 pages
Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939502
Show Author Affiliations
Kathleen A Magee, University of Arizona (United States)
William L Wolfe, University of Arizona (United States)

Published in SPIE Proceedings Vol. 0675:
Stray Radiation V
Robert P. Breault, Editor(s)

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