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Proceedings Paper

Metal Deposition By Laser Driven Pyrolysis Of Solid Organometallic Films
Author(s): R Y Jan; S D Allen
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Paper Abstract

The localized deposition of metal and metal oxide films by laser thermal decomposition of a solid organometallic film has been investigated. Several different laser sources have been used to irradiate commercially available organometallic resinate films applied using standard photoresist techniques on glass and quartz substrates. The focused laser causes localized decomposition of the organometallic film and the unreacted film is removed with solvent. Decomposition occurs stepwise with the initial state being insoluble but opaque and nonconducting. Continued irradiation results in metallic appearing films. Film dimensions considerably less than the laser spot diameter could be be produced under appropriate irradiation conditions.

Paper Details

Date Published: 14 June 1984
PDF: 7 pages
Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); doi: 10.1117/12.939438
Show Author Affiliations
R Y Jan, University of Southern California (United States)
S D Allen, University of Southern California (United States)

Published in SPIE Proceedings Vol. 0459:
Laser-Assisted Deposition, Etching, and Doping
Susan Davis Allen, Editor(s)

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