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Proceedings Paper

Uv-Induced Photodeposition Of Fe Films From Iron Carbonyl
Author(s): P J Love; R T Loda; R A Rosenberg; A K Green; Victor Rehn
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Paper Abstract

We present results on the 77K photodecomposition of Fe(C0)5 to produce Fe films using synchrotron and excimer laser radiation. Analysis of these films included in situ photon-stimulated ion desorption (PSID) and total electron yield (TEY) spectroscopies, and ex situ Auger electron spectroscopy (AES), scanning electron microscopy (SEM), X-ray fluorescence, and resistivity measurements. For the films grown using synchrotron radiation, the various ion products were identified and their intensities monitored during photolysis. For the films grown using excimer laser radiation, appropriate laser power densities and Fe(C0)5 pressures produced adherent metallic films which contained less than 13 atomic % oxygen and carbon contamination.

Paper Details

Date Published: 14 June 1984
PDF: 8 pages
Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); doi: 10.1117/12.939431
Show Author Affiliations
P J Love, Naval Weapons Center (United States)
R T Loda, Naval Weapons Center (United States)
R A Rosenberg, Naval Weapons Center (United States)
A K Green, Naval Weapons Center (United States)
Victor Rehn, Naval Weapons Center (United States)

Published in SPIE Proceedings Vol. 0459:
Laser-Assisted Deposition, Etching, and Doping
Susan Davis Allen, Editor(s)

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