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Proceedings Paper

Zone Plate Designs For The Soft X-Ray Range
Author(s): Roman Tatchyn; Paul L Csonka; Ingolf Lindau
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Paper Abstract

The properties of phase and amplitude modulating zone plates have to date been examined by various investigators interested in the performance of these structures in the soft x-ray range. With only few exceptions, however, these investigations have focussed on computing the performance of pre-determined zone plate geometries, with small attention being paid to the question of establishing the optimum geometry for maximization of the diffracted power. In view of the fact that maximization of the diffracted power is an extremely important goal in the soft x-ray range, especially.with regard to future developments in x-ray laser tech-nology and x-ray microscopy, we have undertaken a comprehensive analysis of this important problem, and in this paper we discuss our analytical approach and solutions. The results are of importance to workers in the field of diffraction optics. Portions of this work were performed at the Stanford Synchrotron Radiation Laboratory, which is supported by the Department of Energy.

Paper Details

Date Published: 19 March 1984
PDF: 12 pages
Proc. SPIE 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology, (19 March 1984); doi: 10.1117/12.939205
Show Author Affiliations
Roman Tatchyn, Stanford University (United States)
Paul L Csonka, Stanford University (United States)
Ingolf Lindau, Stanford University (United States)

Published in SPIE Proceedings Vol. 0448:
X-Ray Lithography and Applications of Soft X-Rays to Technology
Alan D. Wilson, Editor(s)

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