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Proceedings Paper

Automatic Measurements Of The Small Angle Variation Using A Holographic Moire Interferometry And A Computer Processing
Author(s): Yoshiaki Nakano
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Paper Abstract

A method for automatic measurement of the small tilt angle variation of an object surface by using a digital holographic moire interferometryI based on computer processing is described. The test surface is placed in the middle of a set of two gratings. A monochromatic plane wave illuminates the first grating and undergoes diffraction. After being reflected by the test surface, the first grating produces the magnified Talbot image. The moire fringe is generated by superimposing this Talbot image on the second grating. The inclination angle of the moire fringe is a measure of the tilt angle of the test surface. Fast and automatic measurement has been achieved with improved accuracy and sensitivity. In the experiment, the small tilt angle variation of the plane mirror is measured.

Paper Details

Date Published: 15 January 1988
PDF: 4 pages
Proc. SPIE 0673, Holography Applications, (15 January 1988); doi: 10.1117/12.939058
Show Author Affiliations
Yoshiaki Nakano, Hokkaido Institute of Pharmaceutical Sciences (Japan)

Published in SPIE Proceedings Vol. 0673:
Holography Applications
Jingtang Ke; Ryszard J. Pryputniewicz, Editor(s)

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